1

Double-layer resist films for submicrometer electron-beam lithography

Year:
1980
Language:
english
File:
PDF, 766 KB
english, 1980
7

Self-aligned phase shifting mask for contact hole fabrication

Year:
1991
Language:
english
File:
PDF, 406 KB
english, 1991
20

Electron beam tester for logic LSIs

Year:
1989
Language:
english
File:
PDF, 780 KB
english, 1989
23

Low energy silicon etching technologies

Year:
1991
Language:
english
File:
PDF, 593 KB
english, 1991
25

E-beam fault diagnosis system for logic VLSIs

Year:
1992
Language:
english
File:
PDF, 677 KB
english, 1992
26

E-beam correction methods for cell projection optical system

Year:
1993
Language:
english
File:
PDF, 277 KB
english, 1993
47

Second subunit of Epo receptor?

Year:
1994
File:
PDF, 155 KB
1994
50

Identification of human APC10/Doc1 as a subunit of anaphase promoting complex

Year:
1999
Language:
english
File:
PDF, 841 KB
english, 1999